TY - GEN
T1 - An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique
AU - Takahashi, Kazuhiro
AU - Fujie, Toshinori
AU - Sato, Nobutaka
AU - Takeoka, Shinji
AU - Sawada, Kazuaki
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/2/23
Y1 - 2017/2/23
N2 - We developed an elastomer-based Fabry-Perot interferometer with 120-1080 nm gap between a freestanding thin film and a substrate using dry transfer technique. A newly developed elastomeric nanosheet using a polystyrene-polybutadiene-polystyrene triblock copolymer (SBS) provides low Young's modulus of 40 MPa, large elastic strain of 40%, and high adhesiveness. A freestanding SBS nanosheet can be formed by dry transfer technique without vacuum and high temperature processes owing to the high adhesiveness of SBS nanosheet. A minimum gap length of 120 nm with an 80 μm in diameter was achieved. With the pressure change, the freestanding membrane was found to deform with good adhesion between the dry transferred SBS and the substrate.
AB - We developed an elastomer-based Fabry-Perot interferometer with 120-1080 nm gap between a freestanding thin film and a substrate using dry transfer technique. A newly developed elastomeric nanosheet using a polystyrene-polybutadiene-polystyrene triblock copolymer (SBS) provides low Young's modulus of 40 MPa, large elastic strain of 40%, and high adhesiveness. A freestanding SBS nanosheet can be formed by dry transfer technique without vacuum and high temperature processes owing to the high adhesiveness of SBS nanosheet. A minimum gap length of 120 nm with an 80 μm in diameter was achieved. With the pressure change, the freestanding membrane was found to deform with good adhesion between the dry transferred SBS and the substrate.
UR - http://www.scopus.com/inward/record.url?scp=85015746169&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85015746169&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2017.7863505
DO - 10.1109/MEMSYS.2017.7863505
M3 - Conference contribution
AN - SCOPUS:85015746169
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 704
EP - 707
BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Y2 - 22 January 2017 through 26 January 2017
ER -