An Optically Delineated 4.2-µm2Self-Aligned Isolated-Plate Stacked-Capacitor DRAM Cell
Shin Ichiro Kimura, Yoshifumi Kawamoto, Norio Hasegawa, Atsushi Hiraiwa, Yoshinobu Nakagome, Masakazu Aoki, Hideo Sunami, Kiyoo Itoh, Teruaki Kisu
研究成果: Article › 査読
6
被引用数
(Scopus)