TY - JOUR
T1 - Analysis of longitudinal leaky surface acoustic waves on LiNbO3/amorphous layer/quartz structure
AU - Asakawa, Shiori
AU - Hayashi, Junki
AU - Suzuki, Masashi
AU - Kakio, Shoji
AU - Tezuka, Ami
AU - Kuwae, Hiroyuki
AU - Yokota, Hiroaki
AU - Yonai, Toshifumi
AU - Kishida, Kazuhito
AU - Mizuno, Jun
N1 - Publisher Copyright:
© 2020 The Japan Society of Applied Physics.
PY - 2020/7/1
Y1 - 2020/7/1
N2 - Recently, bonded structures comprising a quartz substrate and a LiNbO3 (LN) or LiTaO3 thin-plate have been attracting attention as a means of obtaining enhanced properties for surface acoustic wave (SAW) devices. It was reported that the bonding strength was extremely improved by utilizing an amorphous thin film as a middle layer. In this research, the propagation and resonance characteristics of longitudinal leaky SAWs on an amorphous layer inserted to the boundary between an X-cut 36°Y-propagating LN (X36°Y-LN) and X35°Y-quartz were investigated. For the metallized surface of an X36°Y-LN/Al2O3/X35°Y-quartz structure, an attenuation of 0.0001 dB /λ was obtained at an LT thin-plate thickness of 0.072λ (λ: wavelength), which was better than that of an X36°Y-LN/X35°Y-quartz structure. Utilizing a finite element method, we found that the admittance ratio and Q factor for the X36°Y-LN/Al2O3/X35°Y-quartz model were improved owing to the reduction of the leakage due to the shear-vertical particle displacement.
AB - Recently, bonded structures comprising a quartz substrate and a LiNbO3 (LN) or LiTaO3 thin-plate have been attracting attention as a means of obtaining enhanced properties for surface acoustic wave (SAW) devices. It was reported that the bonding strength was extremely improved by utilizing an amorphous thin film as a middle layer. In this research, the propagation and resonance characteristics of longitudinal leaky SAWs on an amorphous layer inserted to the boundary between an X-cut 36°Y-propagating LN (X36°Y-LN) and X35°Y-quartz were investigated. For the metallized surface of an X36°Y-LN/Al2O3/X35°Y-quartz structure, an attenuation of 0.0001 dB /λ was obtained at an LT thin-plate thickness of 0.072λ (λ: wavelength), which was better than that of an X36°Y-LN/X35°Y-quartz structure. Utilizing a finite element method, we found that the admittance ratio and Q factor for the X36°Y-LN/Al2O3/X35°Y-quartz model were improved owing to the reduction of the leakage due to the shear-vertical particle displacement.
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U2 - 10.35848/1347-4065/ab8c9d
DO - 10.35848/1347-4065/ab8c9d
M3 - Article
AN - SCOPUS:85085658562
SN - 0021-4922
VL - 59
JO - Japanese journal of applied physics
JF - Japanese journal of applied physics
IS - SK
M1 - SKKC12
ER -