Application of Monte Carlo calculation to fundamentals of scanning Auger electron microscopy

Spatial distributions of Auger signals generated in an aluminum target in scanning Auger electron microscopy were obtained by Monte Carlo calculations including secondary electron generation. In the low-energy region, the cross sections calculated by the partial wave expansion method were used instead of the screened Rutherford cross section to describe the elastic scattering process. The result suggests that secondary electrons of high energy are a significant source of Auger signals, particularly LVV-Auger electrons, in scanning Auger electron microscopy.