APPLICATION OF MONTE CARLO TECHNIQUE TO QUANTITATIVE AUGER ANALYSIS - APPROACH FOR QUANTITATIVE CORRECTION OF ELECTRON BACKSCATTERING EFFECT.

Ryuichi Shimizu; Shingo Ichimura

APPLICATION OF MONTE CARLO TECHNIQUE TO QUANTITATIVE AUGER ANALYSIS - APPROACH FOR QUANTITATIVE CORRECTION OF ELECTRON BACKSCATTERING EFFECT.

Ryuichi Shimizu^*, Shingo Ichimura

^*この研究の対応する著者

研究成果: Article › 査読

抄録

This work briefly reviews studies of the backscattering effect and then presents the authors most recent theoretical results that should lead to more accurate quantitative AES analysis. These theoretical results were obtained from Monte Carlo calculations based on the use of more precise theoretical expressions for both the elastic and inelastic scattering; i. e. , elastic scattering cross-sections calculated by the partial wave expansion method and Gryzinski's excitation function combined with Bethe's stopping power, respectively.

本文言語	English
ページ（範囲）	221-230
ページ数	10
ジャーナル	Scanning Electron Microscopy
出版ステータス	Published - 1981 1月 1
外部発表	はい

ASJC Scopus subject areas

制御およびシステム工学
生物理学

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引用スタイル

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