Atomic force microscopy observation of layer-by-layer growth of ultrathin silicon dioxide by ozone gas at room temperature

T. Maeda; A. Kurokawa; K. Sakamoto; A. Ando; H. Itoh; S. Ichimura

doi:10.1116/1.1356064

Atomic force microscopy observation of layer-by-layer growth of ultrathin silicon dioxide by ozone gas at room temperature

T. Maeda^*, A. Kurokawa, K. Sakamoto, A. Ando, H. Itoh, S. Ichimura

^*この研究の対応する著者

研究成果: Article › 査読

17 被引用数 (Scopus)

抄録

The ozone oxidized surface was assessed via AFM observation. It was found that the step-terrace structure of the clean flat Si (001) is replicated on the surface of the ozone oxides. Conformal oxide layers from 1 monolayer to 1 nm thick with atomic steps and terraces were successfully fabricated. The AFM images of the ozone oxide surface preserved the step and terrace structures.

本文言語	English
ページ（範囲）	589-592
ページ数	4
ジャーナル	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
巻	19
号	2
DOI	https://doi.org/10.1116/1.1356064
出版ステータス	Published - 2001 3月
外部発表	はい

ASJC Scopus subject areas

凝縮系物理学
電子工学および電気工学

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abstract = "The ozone oxidized surface was assessed via AFM observation. It was found that the step-terrace structure of the clean flat Si (001) is replicated on the surface of the ozone oxides. Conformal oxide layers from 1 monolayer to 1 nm thick with atomic steps and terraces were successfully fabricated. The AFM images of the ozone oxide surface preserved the step and terrace structures.",

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AU - Maeda, T.

AU - Kurokawa, A.

AU - Sakamoto, K.

AU - Ando, A.

AU - Itoh, H.

AU - Ichimura, S.

PY - 2001/3

Y1 - 2001/3

N2 - The ozone oxidized surface was assessed via AFM observation. It was found that the step-terrace structure of the clean flat Si (001) is replicated on the surface of the ozone oxides. Conformal oxide layers from 1 monolayer to 1 nm thick with atomic steps and terraces were successfully fabricated. The AFM images of the ozone oxide surface preserved the step and terrace structures.

AB - The ozone oxidized surface was assessed via AFM observation. It was found that the step-terrace structure of the clean flat Si (001) is replicated on the surface of the ozone oxides. Conformal oxide layers from 1 monolayer to 1 nm thick with atomic steps and terraces were successfully fabricated. The AFM images of the ozone oxide surface preserved the step and terrace structures.

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Atomic force microscopy observation of layer-by-layer growth of ultrathin silicon dioxide by ozone gas at room temperature

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