The ozone oxidized surface was assessed via AFM observation. It was found that the step-terrace structure of the clean flat Si (001) is replicated on the surface of the ozone oxides. Conformal oxide layers from 1 monolayer to 1 nm thick with atomic steps and terraces were successfully fabricated. The AFM images of the ozone oxide surface preserved the step and terrace structures.
|ジャーナル||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|出版ステータス||Published - 2001 3月|
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