Attempts on pico-precision machining via combination of ELID-grinding and polishing

Hitoshi Ohmori; Yunji Kim; Yoshihiro Uehara; Hiroshi Kasuga; Teruko Ono-Kato; Weimin Lin; Syuhei Kurokawa; Shinjiro Umezu

doi:10.2493/jjspe.85.304

Attempts on pico-precision machining via combination of ELID-grinding and polishing

Hitoshi Ohmori, Yunji Kim, Yoshihiro Uehara, Hiroshi Kasuga, Teruko Ono-Kato, Weimin Lin, Syuhei Kurokawa, Shinjiro Umezu

研究成果: Article › 査読

1 被引用数 (Scopus)

本文言語	English
ページ（範囲）	304-309
ページ数	6
ジャーナル	Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
巻	85
号	4
DOI	https://doi.org/10.2493/jjspe.85.304
出版ステータス	Published - 2019
外部発表	はい

ASJC Scopus subject areas

機械工学

文献へのアクセス

10.2493/jjspe.85.304

他のファイルとリンク

引用スタイル

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title = "Attempts on pico-precision machining via combination of ELID-grinding and polishing",

keywords = "Broad-band fabrication, CMP, ELID, MRF, Pico-precision machining, Ultraprecision grinding",

author = "Hitoshi Ohmori and Yunji Kim and Yoshihiro Uehara and Hiroshi Kasuga and Teruko Ono-Kato and Weimin Lin and Syuhei Kurokawa and Shinjiro Umezu",

year = "2019",

doi = "10.2493/jjspe.85.304",

language = "English",

volume = "85",

pages = "304--309",

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TY - JOUR

T1 - Attempts on pico-precision machining via combination of ELID-grinding and polishing

AU - Ohmori, Hitoshi

AU - Kim, Yunji

AU - Uehara, Yoshihiro

AU - Kasuga, Hiroshi

AU - Ono-Kato, Teruko

AU - Lin, Weimin

AU - Kurokawa, Syuhei

AU - Umezu, Shinjiro

PY - 2019

Y1 - 2019

KW - Broad-band fabrication

KW - CMP

KW - ELID

KW - MRF

KW - Pico-precision machining

KW - Ultraprecision grinding

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DO - 10.2493/jjspe.85.304

M3 - Article

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EP - 309

JO - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

JF - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

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