TY - JOUR
T1 - Basic research of vibration energy harvesting micro device using vinylidene fluoride / trifluoroethylene copolymer thin film
AU - Takiguchi, T.
AU - Sasaki, T.
AU - Nakajima, T.
AU - Yamaura, S.
AU - Sekiguchi, T.
AU - Shoji, S.
N1 - Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2014
Y1 - 2014
N2 - Basic research of MEMS based micro devices for vibration energy harvesting using vinylidene fluoride / trifluoroethylene (VDF/TrFE) copolymer thin film was investigated. The VDF/TrFE copolymer thin film was formed by spin coating. Thickness of VDF/TrFE copolymer thin film was ranged from 375 nm to 2793 nm. Impedance of VDF/TrFE copolymer thin film was measured by LCR meter. Thin film in each thickness was fully poled by voltage based on C-V characteristics result. Generated power of the devices under applied vibration was observed by an oscilloscope. When the film thickness is 2793 nm, the generated power was about 0.815 μJ.
AB - Basic research of MEMS based micro devices for vibration energy harvesting using vinylidene fluoride / trifluoroethylene (VDF/TrFE) copolymer thin film was investigated. The VDF/TrFE copolymer thin film was formed by spin coating. Thickness of VDF/TrFE copolymer thin film was ranged from 375 nm to 2793 nm. Impedance of VDF/TrFE copolymer thin film was measured by LCR meter. Thin film in each thickness was fully poled by voltage based on C-V characteristics result. Generated power of the devices under applied vibration was observed by an oscilloscope. When the film thickness is 2793 nm, the generated power was about 0.815 μJ.
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U2 - 10.1088/1742-6596/557/1/012030
DO - 10.1088/1742-6596/557/1/012030
M3 - Conference article
AN - SCOPUS:84915818751
SN - 1742-6588
VL - 557
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 012030
T2 - 14th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications, PowerMEMS 2014
Y2 - 18 November 2014 through 21 November 2014
ER -