Characteristics of molybdenum thin-film plate oscillators fabricated by minimum deformation micromachining

Kenji Miyazaki^*, Noriyoshi Yamauchi, Tomoko Hisaki, Ryouichi Takahashi, Kiyoshi Itao

^*この研究の対応する著者

研究成果: Article › 査読

本文言語	English
ページ（範囲）	53-54
ページ数	2
ジャーナル	International Journal of the Japan Society for Precision Engineering
巻	31
号	1
出版ステータス	Published - 1997 3月 1
外部発表	はい

ASJC Scopus subject areas

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AU - Itao, Kiyoshi

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