TY - JOUR
T1 - Characteristics of Ti films for transition-edge sensor microcalorimeters
AU - Ukibe, M.
AU - Koyanagi, M.
AU - Ohkubo, M.
AU - Pressler, H.
AU - Kobayashi, Naoto
PY - 1999/10/21
Y1 - 1999/10/21
N2 - We are developing X-ray microcalorimeters using superconducting transition-edge sensors (TESs), which can be operated at relatively high base temperatures of a 3He cryostat. For this purpose, we have selected Ti films to be used as TESs. The Ti films were deposited on different substrates by RF-sputtering. It was found that the superconducting properties of the Ti films depended on Ar pressure, film thickness, and substrate surface roughness.
AB - We are developing X-ray microcalorimeters using superconducting transition-edge sensors (TESs), which can be operated at relatively high base temperatures of a 3He cryostat. For this purpose, we have selected Ti films to be used as TESs. The Ti films were deposited on different substrates by RF-sputtering. It was found that the superconducting properties of the Ti films depended on Ar pressure, film thickness, and substrate surface roughness.
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U2 - 10.1016/S0168-9002(99)00631-2
DO - 10.1016/S0168-9002(99)00631-2
M3 - Article
AN - SCOPUS:0342868316
SN - 0168-9002
VL - 436
SP - 256
EP - 261
JO - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
JF - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
IS - 1-2
ER -