TY - JOUR
T1 - Characterization of (112̄0) textured ZnO films fabricated by RF magnetron sputtering
AU - Yanagitani, Takahiko
AU - Tomohiro, Shin Ichi
AU - Nohara, Takuya
AU - Matsukawa, Mami
AU - Watanabe, Yoshiaki
AU - Otani, Takahiko
PY - 2004/5
Y1 - 2004/5
N2 - Using a conventional RF magnetron sputtering system, we have obtained two types of ZnO films on various kinds of substrate. One is a film with the c-axes of crystallites unidirectionally aligned in the substrate plane {(112̄0) textured film}, The other is a film with c-axes parallel and perpendicular to the plane (mixed texture film). The former is expected to realize a shear wave transducer on the surfaces of various materials. The alignment of c-axes of crystallites in the plane was then carefully investigated by the X-ray pole figure analysis. The elastic anisotropy in the film has been successfully measured by the Brillouin scattering methcd. The (1120) textured film did not excite the elastic waves; however, comparatively strong shear waves were actually excited by the mixed texture film.
AB - Using a conventional RF magnetron sputtering system, we have obtained two types of ZnO films on various kinds of substrate. One is a film with the c-axes of crystallites unidirectionally aligned in the substrate plane {(112̄0) textured film}, The other is a film with c-axes parallel and perpendicular to the plane (mixed texture film). The former is expected to realize a shear wave transducer on the surfaces of various materials. The alignment of c-axes of crystallites in the plane was then carefully investigated by the X-ray pole figure analysis. The elastic anisotropy in the film has been successfully measured by the Brillouin scattering methcd. The (1120) textured film did not excite the elastic waves; however, comparatively strong shear waves were actually excited by the mixed texture film.
KW - (112̄0) textured ZnO film
KW - Brillouin scattering method
KW - Pole figure analysis
KW - RF magnetron sputtering
KW - Shear wave transducer
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U2 - 10.1143/JJAP.43.3004
DO - 10.1143/JJAP.43.3004
M3 - Article
AN - SCOPUS:3242776935
SN - 0021-4922
VL - 43
SP - 3004
EP - 3007
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
IS - 5 B
ER -