Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure

D. H. Yoon; T. Sekiguchi; J. S. Go; S. Shoji

doi:10.1109/MEMSYS.2012.6170189

Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure

D. H. Yoon^*, T. Sekiguchi, J. S. Go, S. Shoji

^*この研究の対応する著者

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

This paper proposes a high accuracy fabrication method for multilayer PDMS (polydimethylsiloxane) devices. Based on newly developed multi-stacking process using three-dimensional (3D) alignment marks of the concave-convex pair structures, a multilayer PDMS device was fabricated without skillful handling for alignment. Total misalignment of smaller than 10 μm is achieved for fabrication of a five-layer PDMS device. The precisely aligned multilayer structure was applied to a novel type of particle separation. By 3D secondary rotation flow in the 3D fluidic microchannel, two types of microparticles of 10 μm and 20 μm in diameter were successfully separated with high throughput.

本文言語	English
ホスト出版物のタイトル	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
ページ	1025-1028
ページ数	4
DOI	https://doi.org/10.1109/MEMSYS.2012.6170189
出版ステータス	Published - 2012 5月 7
イベント	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France 継続期間: 2012 1月 29 → 2012 2月 2

出版物シリーズ

名前	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN（印刷版）	1084-6999

Conference

Conference	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
国/地域	France
City	Paris
Period	12/1/29 → 12/2/2

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
凝縮系物理学
機械工学
電子工学および電気工学

文献へのアクセス

10.1109/MEMSYS.2012.6170189

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引用スタイル

Yoon, D. H., Sekiguchi, T., Go, J. S., & Shoji, S. (2012). Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp. 1025-1028). [6170189] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2012.6170189

Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure. / Yoon, D. H.; Sekiguchi, T.; Go, J. S. その他.
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1025-1028 6170189 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

研究成果: Conference contribution

Yoon, DH, Sekiguchi, T, Go, JS & Shoji, S 2012, Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure. in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012., 6170189, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1025-1028, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 12/1/29. https://doi.org/10.1109/MEMSYS.2012.6170189

Yoon DH, Sekiguchi T, Go JS, Shoji S. Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1025-1028. 6170189. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2012.6170189

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title = "Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure",

abstract = "This paper proposes a high accuracy fabrication method for multilayer PDMS (polydimethylsiloxane) devices. Based on newly developed multi-stacking process using three-dimensional (3D) alignment marks of the concave-convex pair structures, a multilayer PDMS device was fabricated without skillful handling for alignment. Total misalignment of smaller than 10 μm is achieved for fabrication of a five-layer PDMS device. The precisely aligned multilayer structure was applied to a novel type of particle separation. By 3D secondary rotation flow in the 3D fluidic microchannel, two types of microparticles of 10 μm and 20 μm in diameter were successfully separated with high throughput.",

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AB - This paper proposes a high accuracy fabrication method for multilayer PDMS (polydimethylsiloxane) devices. Based on newly developed multi-stacking process using three-dimensional (3D) alignment marks of the concave-convex pair structures, a multilayer PDMS device was fabricated without skillful handling for alignment. Total misalignment of smaller than 10 μm is achieved for fabrication of a five-layer PDMS device. The precisely aligned multilayer structure was applied to a novel type of particle separation. By 3D secondary rotation flow in the 3D fluidic microchannel, two types of microparticles of 10 μm and 20 μm in diameter were successfully separated with high throughput.

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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BT - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012

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Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structure

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出版物シリーズ

Conference

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