TY - JOUR
T1 - Control of adsorbates and conduction on CVD-grown diamond surface, using scanning probe microscope
AU - Tachiki, Minoru
AU - Fukuda, Tohru
AU - Sugata, Kenta
AU - Seo, Hokuto
AU - Umezawa, Hitoshi
AU - Kawarada, Hiroshi
N1 - Funding Information:
The authors thank Dr. Fujimori and Dr. Shikata of Sumitomo Electric Industries for providing the synthetic Ib diamond substrates. This work was partly supported by Murata Science Foundation and a Grant-in-aid for General Scientific Research (10450127, 09555103, 11750269) from the Ministry of Education, Science, Sports and Culture of Japan, and also supported by a Waseda University Grant for Special Research Project (99A-212).
PY - 2000
Y1 - 2000
N2 - Nanofabrication on a hydrogen-terminated diamond surface is performed by controlling surface adsorbates, using a scanning probe microscope (SPM) technique. Insulated areas are successfully obtained by changing hydrogen termination to oxygen termination. The Auger electron spectrum (AES) indicated the presence of oxygen adsorbed on the modified surface area. A small isolated conductive area is fabricated, and using this structure, a metal-insulator-metal (MIM) diode-like I-V characteristic is observed. Anodic oxidation using the surface water is also suggested for our experimental results.
AB - Nanofabrication on a hydrogen-terminated diamond surface is performed by controlling surface adsorbates, using a scanning probe microscope (SPM) technique. Insulated areas are successfully obtained by changing hydrogen termination to oxygen termination. The Auger electron spectrum (AES) indicated the presence of oxygen adsorbed on the modified surface area. A small isolated conductive area is fabricated, and using this structure, a metal-insulator-metal (MIM) diode-like I-V characteristic is observed. Anodic oxidation using the surface water is also suggested for our experimental results.
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U2 - 10.1016/S0169-4332(00)00149-5
DO - 10.1016/S0169-4332(00)00149-5
M3 - Article
AN - SCOPUS:0034205944
SN - 0169-4332
VL - 159
SP - 578
EP - 582
JO - Applied Surface Science
JF - Applied Surface Science
M1 - 1092
ER -