@article{fdf6b87faca142deb3b3bb4fccd430a3,
title = "Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures",
abstract = "Micro-electromechanical systems (MEMS) magnetic sensing at high temperatures over 573 K has not been achieved due to the difficulty in designing the rational interface with strong coupling. Here, a magnetic sensor based on FeGa/single-crystal diamond (SCD) MEMS resonator is realized to circumvent the challenges in magnetic sensing. The present magnetic sensor exhibits a stable high-sensitivity of 7.3 Hz/mT at 573 K and an experimental noise level of ~4nT/√Hz. The performance exceeds those of reported high-temperature magnetic sensors. This work offers a strategy for developing magnetic sensors with merits super to the existing ones.",
keywords = "MEMS, Single-crystal diamond, galfenol (FeGa), magnetostrictive effect",
author = "Zilong Zhang and Yuanzhao Wu and Liwen Sang and Haihua Wu and Jian Huang and Linjun Wang and Yukiko Takahashi and Runwei Li and Satoshi Koizumi and Masaya Toda and Akita, {Indianto Mohammad} and Yasuo Koide and Meiyong Liao",
note = "Funding Information: This work was supported by JSPS KAKENHI [grant number 15H03999, 15H03980]; Tsukuba Global Innovation Promotion Agency, MEXT of Japan, CICP (2016YFE0126700) and China Scholarship Council. Publisher Copyright: {\textcopyright} 2020, {\textcopyright} 2020 The Author(s). Published by Informa UK Limited, trading as Taylor & Francis Group.",
year = "2020",
month = may,
day = "3",
doi = "10.1080/21663831.2020.1734680",
language = "English",
volume = "8",
pages = "180--186",
journal = "Materials Research Letters",
issn = "2166-3831",
publisher = "Taylor and Francis Ltd.",
number = "5",
}