TY - JOUR
T1 - Crystallinity and strength of diamond bombarded with low energy ion beams
AU - Miyamoto, Iwao
AU - Nishimura, Kazuhito
AU - Kawata, Kozo
AU - Kawarada, Hiroshi
AU - Shimada, Shoichi
PY - 1989/3/2
Y1 - 1989/3/2
N2 - In order to improve the performance of diamond tools formed or sharpened with Ar ions, we have used RHEED to investigate the crystallinity of diamond specimens machined with argon ions of 0.4-2.0 keV and processed with hydrogen plasma (ions and atoms) at 800-850° C under various conditions. Moreover, the microstrength of diamond specimens machined with Ar ions and processed with hydrogen plasma has also been investigated by Hertz indentation. The damaged layer of the diamond specimen caused by Ar ion bombardment can be removed by processing with hydrogen plasma. Moreover, the microstrength of a diamond specimen prefinished by conventional mechanical lapping (39 GPa) is decreased to 34 GPa by bombardment with argon ions. However, that is increased to 47 GPa by processing with hydrogen plasma.
AB - In order to improve the performance of diamond tools formed or sharpened with Ar ions, we have used RHEED to investigate the crystallinity of diamond specimens machined with argon ions of 0.4-2.0 keV and processed with hydrogen plasma (ions and atoms) at 800-850° C under various conditions. Moreover, the microstrength of diamond specimens machined with Ar ions and processed with hydrogen plasma has also been investigated by Hertz indentation. The damaged layer of the diamond specimen caused by Ar ion bombardment can be removed by processing with hydrogen plasma. Moreover, the microstrength of a diamond specimen prefinished by conventional mechanical lapping (39 GPa) is decreased to 34 GPa by bombardment with argon ions. However, that is increased to 47 GPa by processing with hydrogen plasma.
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U2 - 10.1016/0168-583X(89)90875-6
DO - 10.1016/0168-583X(89)90875-6
M3 - Article
AN - SCOPUS:0024620453
SN - 0168-583X
VL - 39
SP - 689
EP - 691
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 1-4
ER -