TY - GEN
T1 - Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding
AU - Mizuno, Jun
AU - Farrens, Sharon
AU - Ishida, Hiroyuki
AU - Dragoi, Viorel
AU - Shinohara, Hidetoshi
AU - Suzuki, Takafumi
AU - Ishizuka, Masanori
AU - Glinsner, Thomas
AU - Shoji, Shuichi
PY - 2005/12/1
Y1 - 2005/12/1
N2 - Low temperature direct bonding method of Cyclo-Olefin Polymer (COP) plates (20mm × 40mm × 2.0mm) has been developed employing surface plasma treatment with various gases such as N2, O2, and 10%-H2/Ar. Surface energy of the bonded interface has been measured by razor blade method. Reasonable bonding strength for flow devices was achieved even at room temperature. The contact angle cmeasurements on the sample surfaces after plasma exposure indicated that the plasma activated surfaces became hydrophilic and this activated state lasted for longer than 2 months. This method is useful to fabricate micro-flow devices for single-molecule level optical bio-detection systems that requires less residual stress and deformation after bonding.
AB - Low temperature direct bonding method of Cyclo-Olefin Polymer (COP) plates (20mm × 40mm × 2.0mm) has been developed employing surface plasma treatment with various gases such as N2, O2, and 10%-H2/Ar. Surface energy of the bonded interface has been measured by razor blade method. Reasonable bonding strength for flow devices was achieved even at room temperature. The contact angle cmeasurements on the sample surfaces after plasma exposure indicated that the plasma activated surfaces became hydrophilic and this activated state lasted for longer than 2 months. This method is useful to fabricate micro-flow devices for single-molecule level optical bio-detection systems that requires less residual stress and deformation after bonding.
KW - Activation
KW - Bonding
KW - COP
KW - Micro-channel
KW - Plasma
UR - http://www.scopus.com/inward/record.url?scp=33749050342&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33749050342&partnerID=8YFLogxK
U2 - 10.1109/ICMENS.2005.37
DO - 10.1109/ICMENS.2005.37
M3 - Conference contribution
AN - SCOPUS:33749050342
SN - 0769523986
SN - 9780769523989
T3 - Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
SP - 346
EP - 349
BT - Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
T2 - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
Y2 - 24 July 2006 through 27 July 2006
ER -