Deterministic single-ion implantation method for quantum processing in silicon and diamond

Physics & Astronomy

• ion implantation 67%
• diamonds 58%
• transistors 58%
• silicon 39%
• statistical distributions 26%
• spikes 24%
• ions 23%
• CMOS 22%
• implantation 21%
• electrical properties 18%
• optical properties 16%
• causes 14%
• photons 13%
• profiles 13%
• performance 10%

Engineering & Materials Science

• Ion implantation 100%
• Doping (additives) 82%
• Diamonds 73%
• Silicon 58%
• Transistors 15%
• Ions 11%
• Self assembled monolayers 9%
• Optical properties 7%
• Oxide semiconductors 7%
• Photons 7%
• Electric properties 6%
• Semiconductor materials 5%
• Metals 3%

Chemical Compounds

• Diamond 70%
• Doping Material 65%
• Ion Implantation 11%
• Self Assembled Monolayer 8%
• Electrical Property 7%
• Ion 7%
• Semiconductor 7%
• Optical Property 6%