Development of a high energy resolution X-ray microcalorimeter using Ti/Au TES

Hiroyuki Kudo*, Yuichi Yokoyama, Shuichi Shoji, Tohru Oshima, Youichi Aruga, Kana Maegami, Ryuichi Fujimoto, Miyazaki Toshiyuki, Kazuhisa Mitsuda


研究成果: Conference article査読

2 被引用数 (Scopus)


A prototype of an X-ray microcalorimeter using Titanium/Gold transition edge sensor (TES) for detecting cosmic rays is fabricated and tested. This paper reports first experimental result of the prototype. By using silicon bulk micromachining, freestanding microstructure suspended with fine beams are obtained to achieve thermal isolation from the substrate. A superconductor, Ti in this case, can be used as a very sensitive temperature sensor at the narrow temperature range around its transition temperature. At the low temperatures below 1 K, the microstructure with very small heat capacity is expected to be thermally detecting single photons. Design consideration to realize radiation detection with extremely good energy resolution has been taken place. Our tentative goal is to obtain the energy resolution of 20 eV for 10 keV radiation at 0.5 K. We have fabricated a test device of the TES. The sensitivity of it is larger than 1000, which is enough for this purpose. The energy resolution of the prototype of the X-ray microcalorimeter was 550 eV (FWHM) for 6 keV radiation at approximately 0.5 K. This value is smaller than that expected. An optimization of the TES features is still necessary for a good energy resolution.

ジャーナルProceedings of SPIE - The International Society for Optical Engineering
出版ステータスPublished - 1999 12月 1
イベントProceedings of the 1999 Design, Characterization, and Packaging for MEMS and Microelectronics - Royal Pines Resort, Aust
継続期間: 1999 10月 271999 10月 29

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学


「Development of a high energy resolution X-ray microcalorimeter using Ti/Au TES」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。