Development of a roll press UV imprint process for replication of microstructures on a large and thin quartz substrate

Motonori Okubo; Yutaka Tsutsui; Kentaro Ishibashi; Lingyi Li; Shuichi Shoji; Jun Mizuno; Masumi Yanagisawa

doi:10.2494/photopolymer.25.229

Development of a roll press UV imprint process for replication of microstructures on a large and thin quartz substrate

Motonori Okubo^*, Yutaka Tsutsui, Kentaro Ishibashi, Lingyi Li, Shuichi Shoji, Jun Mizuno, Masumi Yanagisawa

^*この研究の対応する著者

研究成果: Article › 査読

1 被引用数 (Scopus)

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In this study, fabrication of microstructures was carried out using newly developed UV imprinting system named "Roller Press Scan®" for large-area replication. Micro lens arrays were replicated using two types of UV resins and molds, onto quartz substrates. Microstructures have been replicated in uniform and have been confirmed high-throughput productivity.

本文言語	English
ページ（範囲）	229-234
ページ数	6
ジャーナル	Journal of Photopolymer Science and Technology
巻	25
号	2
DOI	https://doi.org/10.2494/photopolymer.25.229
出版ステータス	Published - 2012

ASJC Scopus subject areas

ポリマーおよびプラスチック
有機化学
材料化学

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10.2494/photopolymer.25.229

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AU - Li, Lingyi

AU - Shoji, Shuichi

AU - Mizuno, Jun

AU - Yanagisawa, Masumi

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KW - Quartz substrate

KW - Roller press scan

KW - UV imprinting

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Development of a roll press UV imprint process for replication of microstructures on a large and thin quartz substrate

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