A local and real-time concentration measuring method for high concentration ozone gas has been developed. The method employs Quadrupole Mass Spectroscopy (QMS) calibrated by low-temperature Thermal Desorption Spectroscopy (TDS). It was impossible to estimate the local ozone concentration by sampling the exhaust gas from the evacuation line. Using the passivated line, ozone concentration at a desired sampling point could be measured directly by the present method. The usefulness of the method was demonstrated by measuring ozone concentration at two particular points in oxidation chamber to be 23% and 40%.
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