Dielectric properties of BaTiO3 thin films prepared by laser ablation

Junya Fujita*, Keigo Suzuki, Nobuyuki Wada, Yukio Sakabe, Kazuo Takeuchi, Yoshimichi Ohki


研究成果: Article査読

5 被引用数 (Scopus)


To study the minimum particle size for a ferroelectric material at which ferroeiectricity is retained, thin films composed of stoichiometric BaTiO 3 nanoparticles were prepared by laser ablation of a Ba-Ti-O ceramic target using a differential mobility analyzer. Highly densified films of various uniform grain sizes were obtained after post-annealing at 600, 700, 800, and 900 °C in an oxygen atmosphere. The dielectric constants of the post-annealed films varied from 100 to 300, depending on the grain size from 65 to 136 nm. These values are comparable to those of BaTiO3 nano-granular films fabricated by metallorganic decomposition or the sol-crystal method. From the capacitance vs bias-voltage relationship and its hysteresis observed for the post-annealed films, it became clear that a phase transformation from paraelectric to ferroelectric occurs at a grain size of approximately 76 nm. It was also clarified from piezoresponse images of the post-annealed films obtained using a scanning probe microscope that ferroelectricity emerges in BaTiO3 nano-size grains at a grain size of approximately 55 nm.

ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
10 A
出版ステータスPublished - 2006 10月 15

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)


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