抄録
In this paper, dimension optimization of supporting portion was carried out for an originally designed high-frequency fundamental AT-cut quartz resonator, which has a firstly applied peripheral electrode and 10-μm-thin vibration portion to generate above 150 MHz fundamental thickness-shear vibration. Using three-dimensional finite element modeling, it is the first time; dimensions of supporting portion were optimized through improving energy trapping and reducing vibration couplings. Based on optimization results, resonators with different dimensions were fabricated and their Q-factors were measured. The experimental results were very consistent with the optimization results. Improvement of the resonator's performance ensured the validation of our method.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 253-259 |
| ページ数 | 7 |
| ジャーナル | IEEJ Transactions on Sensors and Micromachines |
| 巻 | 133 |
| 号 | 9 |
| DOI | |
| 出版ステータス | Published - 2013 |
ASJC Scopus subject areas
- 電子工学および電気工学
- 機械工学