Effect of polar groups on the electrical breakdown strength of plasma polymer films

Toshiki Nakano*, Masao Fukuyama, Yoshimichi Ohki

*この研究の対応する著者

研究成果: Paper査読

1 被引用数 (Scopus)

抄録

The electric breakdown field of plasma polymer films was studied by applying rectangular voltage pulses. The breakdown field increases by the incorporation of fluorine atoms into the film when the pulse width is shorter than 5 μs. This is due to the scattering of electronic carriers caused by C-F bonds.

本文言語English
ページ383-386
ページ数4
出版ステータスPublished - 1988
イベントProceedings - Second International Conference on Properties and Applications of Dielectric Materials - Beijing, China
継続期間: 1988 9月 121988 9月 16

Other

OtherProceedings - Second International Conference on Properties and Applications of Dielectric Materials
CityBeijing, China
Period88/9/1288/9/16

ASJC Scopus subject areas

  • 工学一般

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