TY - GEN
T1 - Effects of atomic disorder on carrier transport in Si nanowire transistors
AU - Minari, Hideki
AU - Zushi, Tomofumi
AU - Watanabe, Takanobu
AU - Kamakura, Yoshinari
AU - Mori, Nobuya
PY - 2011/11/1
Y1 - 2011/11/1
N2 - Effects of oxidation-process-induced atomic disorder on extended electronic states in the channel region of narrow Si nanowire (NW) field-effect- transistors (FETs) are theoretically investigated by using the molecular dynamics, empirical tight-binding, and non-equilibrium Green's function methods. Simulation results show that the injection velocity in n-type Si NW FETs is less affected by the disorder compared to p-type devices, which can be attributed to differences in the in-plane carrier profile.
AB - Effects of oxidation-process-induced atomic disorder on extended electronic states in the channel region of narrow Si nanowire (NW) field-effect- transistors (FETs) are theoretically investigated by using the molecular dynamics, empirical tight-binding, and non-equilibrium Green's function methods. Simulation results show that the injection velocity in n-type Si NW FETs is less affected by the disorder compared to p-type devices, which can be attributed to differences in the in-plane carrier profile.
UR - http://www.scopus.com/inward/record.url?scp=80054970562&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=80054970562&partnerID=8YFLogxK
U2 - 10.1109/SISPAD.2011.6035041
DO - 10.1109/SISPAD.2011.6035041
M3 - Conference contribution
AN - SCOPUS:80054970562
SN - 9781612844169
T3 - International Conference on Simulation of Semiconductor Processes and Devices, SISPAD
SP - 27
EP - 30
BT - 2011 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2011
T2 - 2011 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2011
Y2 - 8 September 2011 through 10 September 2011
ER -