Electro-optic properties of Pb(Zr1-xTix)O 3 (X = 0, 0.3, 0.6) films prepared by aerosol deposition

Masafumi Nakada*, Keishi Ohashi, Jun Akedo


研究成果: Article査読

28 被引用数 (Scopus)


We measured annealing temperature and the Zr-to-Ti concentration ratio dependence of the electro-optic (EO) effect for highly transparent Pb(Zr 1-xTix)O3 [PZT] films more than 1 μm thick, directly deposited on glass substrates by aerosol deposition (AD). X-ray diffraction patterns show that as-deposited AD films have a large strain and lattice distortions, and these affects can be attenuated by increasing annealing temperature. The dielectric constant of AD-PZT films increased with annealing temperature, which is consistent with the X-ray diffraction measurement. The EO effect was enhanced with increasing Zr concentration, and a linear EO coefficient (rc) of 102 pm/V was obtained for the PbZr 0.6T0.4O3 film annealed at 600°C, whose composition is near its morphotropic phase boundary. The rc of PbZr0.6T0.4O3 films increased with annealing temperature, and the film annealed at 850°C showed an rc of 168 pm/V. The EO measurements show that AD is a highly promising film-deposition method for optical devices such as EO modulators and optical switches.

ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
出版ステータスPublished - 2005 8月 26

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)


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