TY - GEN
T1 - Electrodeposition of ZnO from acetate bath for thermoelectric devices
AU - Matsuo, H.
AU - Yoshitoku, K.
AU - Furuyama, D.
AU - Saito, M.
AU - Homma, T.
PY - 2016
Y1 - 2016
N2 - We attempted to form ZnO films with smooth surface for the application of thermoelectric micro-devices, using electrodeposition process. In order to reduce the defects of the films such as cracks and pits mainly caused by the gas evolution, the bath containing acetate in addition to nitrate ions was developed to reduce the gas evolution during the deposition. Using this bath, formation of ZnO. rather than Zn metallic films, was confirmed by Raman spectroscopy. The films had no cracks and the surface became smoother than those eiectrodeposited from the conventional nitrate-based bath. In order to fabricate the micro- devices, The ZnO was eiectrodeposited into the patterns with diameter of 200μm. As a result, ZnO successfully filled the pattern keeping the smooth surface conditions, which demonstrated the applicability of the ZnO films to micro-device fabrication.
AB - We attempted to form ZnO films with smooth surface for the application of thermoelectric micro-devices, using electrodeposition process. In order to reduce the defects of the films such as cracks and pits mainly caused by the gas evolution, the bath containing acetate in addition to nitrate ions was developed to reduce the gas evolution during the deposition. Using this bath, formation of ZnO. rather than Zn metallic films, was confirmed by Raman spectroscopy. The films had no cracks and the surface became smoother than those eiectrodeposited from the conventional nitrate-based bath. In order to fabricate the micro- devices, The ZnO was eiectrodeposited into the patterns with diameter of 200μm. As a result, ZnO successfully filled the pattern keeping the smooth surface conditions, which demonstrated the applicability of the ZnO films to micro-device fabrication.
UR - http://www.scopus.com/inward/record.url?scp=85025147923&partnerID=8YFLogxK
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U2 - 10.1149/07552.0143ecst
DO - 10.1149/07552.0143ecst
M3 - Conference contribution
AN - SCOPUS:85025147923
T3 - ECS Transactions
SP - 143
EP - 148
BT - General Student Poster Session
A2 - Suroviec, A. H.
A2 - Subramanian, V.
A2 - Chaitanya, V.
A2 - Sundaram, K.
A2 - Pharkaya, P.
A2 - Sugimoto, W.
A2 - Yoon, W.-S.
PB - Electrochemical Society Inc.
T2 - Symposium on General Student Poster Session - PRiME 2016/230th ECS Meeting
Y2 - 2 October 2016 through 7 October 2016
ER -