Ellipsoidal micro lens fabricated by depositing parylene directly on liquid

Ryoh Miyamoto; N. Binh-Khiem; E. Iwase; K. Matsumoto; I. Shimoyama

doi:10.1109/SENSOR.2009.5285855

Ellipsoidal micro lens fabricated by depositing parylene directly on liquid

Ryoh Miyamoto^*, N. Binh-Khiem, E. Iwase, K. Matsumoto, I. Shimoyama

^*この研究の対応する著者

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

We report on an ellipsoidal liquid lens fabricated by PoLD (Parylene on liquid deposition). We fabricated ellipsoidal liquid lenses of 0.50, 1.00, 1.50, and 2.00 μl in volume on hydrophilic elliptical domains with 5.00mm major diameter and 2.50mm minor diameter. We measured the two focal lengths corresponding to major and minor diameters by observing the image formed by a laser beam. We verified that measured focal lengths agreed with theoretical calculated results. In addition, we showed that our method enables us to fabricate ellipsoidal lenses which have the focal lengths as designed.

本文言語	English
ホスト出版物のタイトル	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
ページ	1365-1368
ページ数	4
DOI	https://doi.org/10.1109/SENSOR.2009.5285855
出版ステータス	Published - 2009 12月 14
外部発表	はい
イベント	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States 継続期間: 2009 6月 21 → 2009 6月 25

出版物シリーズ

名前	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
国/地域	United States
City	Denver, CO
Period	09/6/21 → 09/6/25

ASJC Scopus subject areas

ハードウェアとアーキテクチャ
電子工学および電気工学

文献へのアクセス

10.1109/SENSOR.2009.5285855

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引用スタイル

Miyamoto, R., Binh-Khiem, N., Iwase, E., Matsumoto, K., & Shimoyama, I. (2009). Ellipsoidal micro lens fabricated by depositing parylene directly on liquid. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1365-1368). Article 5285855 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285855

Ellipsoidal micro lens fabricated by depositing parylene directly on liquid. / Miyamoto, Ryoh; Binh-Khiem, N.; Iwase, E. その他.
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 1365-1368 5285855 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

研究成果: Conference contribution

Miyamoto, R, Binh-Khiem, N, Iwase, E, Matsumoto, K & Shimoyama, I 2009, Ellipsoidal micro lens fabricated by depositing parylene directly on liquid. in TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285855, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 1365-1368, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, United States, 09/6/21. https://doi.org/10.1109/SENSOR.2009.5285855

Miyamoto R, Binh-Khiem N, Iwase E, Matsumoto K, Shimoyama I. Ellipsoidal micro lens fabricated by depositing parylene directly on liquid. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 1365-1368. 5285855. (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/SENSOR.2009.5285855

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title = "Ellipsoidal micro lens fabricated by depositing parylene directly on liquid",

abstract = "We report on an ellipsoidal liquid lens fabricated by PoLD (Parylene on liquid deposition). We fabricated ellipsoidal liquid lenses of 0.50, 1.00, 1.50, and 2.00 μl in volume on hydrophilic elliptical domains with 5.00mm major diameter and 2.50mm minor diameter. We measured the two focal lengths corresponding to major and minor diameters by observing the image formed by a laser beam. We verified that measured focal lengths agreed with theoretical calculated results. In addition, we showed that our method enables us to fabricate ellipsoidal lenses which have the focal lengths as designed.",

keywords = "Chemical vapor deposition, Ellipsoidal lens, Liquid lens, Parylene",

author = "Ryoh Miyamoto and N. Binh-Khiem and E. Iwase and K. Matsumoto and I. Shimoyama",

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AU - Miyamoto, Ryoh

AU - Binh-Khiem, N.

AU - Iwase, E.

AU - Matsumoto, K.

AU - Shimoyama, I.

PY - 2009/12/14

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N2 - We report on an ellipsoidal liquid lens fabricated by PoLD (Parylene on liquid deposition). We fabricated ellipsoidal liquid lenses of 0.50, 1.00, 1.50, and 2.00 μl in volume on hydrophilic elliptical domains with 5.00mm major diameter and 2.50mm minor diameter. We measured the two focal lengths corresponding to major and minor diameters by observing the image formed by a laser beam. We verified that measured focal lengths agreed with theoretical calculated results. In addition, we showed that our method enables us to fabricate ellipsoidal lenses which have the focal lengths as designed.

AB - We report on an ellipsoidal liquid lens fabricated by PoLD (Parylene on liquid deposition). We fabricated ellipsoidal liquid lenses of 0.50, 1.00, 1.50, and 2.00 μl in volume on hydrophilic elliptical domains with 5.00mm major diameter and 2.50mm minor diameter. We measured the two focal lengths corresponding to major and minor diameters by observing the image formed by a laser beam. We verified that measured focal lengths agreed with theoretical calculated results. In addition, we showed that our method enables us to fabricate ellipsoidal lenses which have the focal lengths as designed.

KW - Chemical vapor deposition

KW - Ellipsoidal lens

KW - Liquid lens

KW - Parylene

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Ellipsoidal micro lens fabricated by depositing parylene directly on liquid

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