The pulse width of a KrF excimer laser was elongated from 40 to 60ns by coupling dually split laser beams with different optical paths. By the irradiation of such elongated laser pulses up to 103 times, strontium bismuth tantalate thin films can be crystallized efficiently to perovskite at a substrate temperature of 650 °C, while the irradiation of nonelongated pulses fails to crystallize the films. The crystallized films have high remanent polarization and coercive field values. The presence of the energy threshold and the critical thickness for crystallization to perovskite is suggested.
|ジャーナル||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|出版ステータス||Published - 2006 3月 8|
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