Enhanced crystallization of strontium bismuth tantalate thin films by irradiation of elongated pulses of KrF excimer laser

Masashi Tsubuku*, Kwang Soo Seol, In Hoon Choi, Yoshimichi Ohki

*この研究の対応する著者

研究成果: Article査読

1 被引用数 (Scopus)

抄録

The pulse width of a KrF excimer laser was elongated from 40 to 60ns by coupling dually split laser beams with different optical paths. By the irradiation of such elongated laser pulses up to 103 times, strontium bismuth tantalate thin films can be crystallized efficiently to perovskite at a substrate temperature of 650 °C, while the irradiation of nonelongated pulses fails to crystallize the films. The crystallized films have high remanent polarization and coercive field values. The presence of the energy threshold and the critical thickness for crystallization to perovskite is suggested.

本文言語English
ページ(範囲)1689-1693
ページ数5
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
45
3 A
DOI
出版ステータスPublished - 2006 3月 8

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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