Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film

Zilong Zhang; Liwen Sang; Jian Huang; Waiyan Chen; Linjun Wang; Yukiko Takahashi; Seiji Mitani; Yasuo Koide; Satoshi Koizumi; Meiyong Liao

doi:10.1016/j.carbon.2020.08.049

Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film

Zilong Zhang, Liwen Sang, Jian Huang, Waiyan Chen, Linjun Wang, Yukiko Takahashi, Seiji Mitani, Yasuo Koide, Satoshi Koizumi, Meiyong Liao^*

^*この研究の対応する著者

研究成果: Article › 査読

13 被引用数 (Scopus)

抄録

The coupling of single crystal diamond (SCD) micro-electromechanical systems (MEMS) through with a functional hetero-material provides the strategy to develop diamond MEMS sensors. Here a noncontact magnetic sensor based on SCD MEMS resonance system functionalized with a boron-doped FeGa (FeGaB) thin film owning excellent magneto-strictive properties on diamond is demonstrated to improve the magnetic sensitivity. The amorphous FeGaB thin film is beneficial for high magnetic sensing performance. The FeGaB/Ti/SCD MEMS magnetic sensor exhibits magnetic sensitivity of as high as 152.1 Hz/mT, which is over four times of those of FeGa/Ti/SCD MEMS magnetic sensors. The derivative of the Young's modulus change with magnetic field (dE/dH) reaches a maximum value of 4.5 GPa/mT at 1.77 mT. By tailoring the magnetic properties with impurity dopant, one can markedly improve the sensitivity of the diamond MEMS magnetic sensitivity toward satisfying the figure-of-merits of ultra-high sensitivity, low noise level and high-reliability magnetic field operation.

本文言語	English
ページ（範囲）	294-301
ページ数	8
ジャーナル	Carbon
巻	170
DOI	https://doi.org/10.1016/j.carbon.2020.08.049
出版ステータス	Published - 2020 12月
外部発表	はい

ASJC Scopus subject areas

化学 (全般)
材料科学（全般）

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10.1016/j.carbon.2020.08.049

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title = "Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film",

abstract = "The coupling of single crystal diamond (SCD) micro-electromechanical systems (MEMS) through with a functional hetero-material provides the strategy to develop diamond MEMS sensors. Here a noncontact magnetic sensor based on SCD MEMS resonance system functionalized with a boron-doped FeGa (FeGaB) thin film owning excellent magneto-strictive properties on diamond is demonstrated to improve the magnetic sensitivity. The amorphous FeGaB thin film is beneficial for high magnetic sensing performance. The FeGaB/Ti/SCD MEMS magnetic sensor exhibits magnetic sensitivity of as high as 152.1 Hz/mT, which is over four times of those of FeGa/Ti/SCD MEMS magnetic sensors. The derivative of the Young's modulus change with magnetic field (dE/dH) reaches a maximum value of 4.5 GPa/mT at 1.77 mT. By tailoring the magnetic properties with impurity dopant, one can markedly improve the sensitivity of the diamond MEMS magnetic sensitivity toward satisfying the figure-of-merits of ultra-high sensitivity, low noise level and high-reliability magnetic field operation.",

keywords = "Diamond, MEMS, Magnetic sensors",

author = "Zilong Zhang and Liwen Sang and Jian Huang and Waiyan Chen and Linjun Wang and Yukiko Takahashi and Seiji Mitani and Yasuo Koide and Satoshi Koizumi and Meiyong Liao",

note = "Funding Information: This work was partially supported by JSPS KAKENHI (Grant Number 20H02212 , 15H03999 ), Tsukuba Global Innovation Promotion Agency, Science and National Natural Science Foundation of China (Grant Number 11875186 ) and Nanotechnology Platform projects sponsored by the Ministry of Education, Culture, Sports, and Technology (MEXT) of Japan . The authors also gratefully thanked financial support from China Scholarship Council. Publisher Copyright: {\textcopyright} 2020 Elsevier Ltd",

year = "2020",

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doi = "10.1016/j.carbon.2020.08.049",

language = "English",

volume = "170",

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T1 - Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film

AU - Zhang, Zilong

AU - Sang, Liwen

AU - Huang, Jian

AU - Chen, Waiyan

AU - Wang, Linjun

AU - Takahashi, Yukiko

AU - Mitani, Seiji

AU - Koide, Yasuo

AU - Koizumi, Satoshi

AU - Liao, Meiyong

N1 - Funding Information: This work was partially supported by JSPS KAKENHI (Grant Number 20H02212 , 15H03999 ), Tsukuba Global Innovation Promotion Agency, Science and National Natural Science Foundation of China (Grant Number 11875186 ) and Nanotechnology Platform projects sponsored by the Ministry of Education, Culture, Sports, and Technology (MEXT) of Japan . The authors also gratefully thanked financial support from China Scholarship Council. Publisher Copyright: © 2020 Elsevier Ltd

PY - 2020/12

Y1 - 2020/12

N2 - The coupling of single crystal diamond (SCD) micro-electromechanical systems (MEMS) through with a functional hetero-material provides the strategy to develop diamond MEMS sensors. Here a noncontact magnetic sensor based on SCD MEMS resonance system functionalized with a boron-doped FeGa (FeGaB) thin film owning excellent magneto-strictive properties on diamond is demonstrated to improve the magnetic sensitivity. The amorphous FeGaB thin film is beneficial for high magnetic sensing performance. The FeGaB/Ti/SCD MEMS magnetic sensor exhibits magnetic sensitivity of as high as 152.1 Hz/mT, which is over four times of those of FeGa/Ti/SCD MEMS magnetic sensors. The derivative of the Young's modulus change with magnetic field (dE/dH) reaches a maximum value of 4.5 GPa/mT at 1.77 mT. By tailoring the magnetic properties with impurity dopant, one can markedly improve the sensitivity of the diamond MEMS magnetic sensitivity toward satisfying the figure-of-merits of ultra-high sensitivity, low noise level and high-reliability magnetic field operation.

AB - The coupling of single crystal diamond (SCD) micro-electromechanical systems (MEMS) through with a functional hetero-material provides the strategy to develop diamond MEMS sensors. Here a noncontact magnetic sensor based on SCD MEMS resonance system functionalized with a boron-doped FeGa (FeGaB) thin film owning excellent magneto-strictive properties on diamond is demonstrated to improve the magnetic sensitivity. The amorphous FeGaB thin film is beneficial for high magnetic sensing performance. The FeGaB/Ti/SCD MEMS magnetic sensor exhibits magnetic sensitivity of as high as 152.1 Hz/mT, which is over four times of those of FeGa/Ti/SCD MEMS magnetic sensors. The derivative of the Young's modulus change with magnetic field (dE/dH) reaches a maximum value of 4.5 GPa/mT at 1.77 mT. By tailoring the magnetic properties with impurity dopant, one can markedly improve the sensitivity of the diamond MEMS magnetic sensitivity toward satisfying the figure-of-merits of ultra-high sensitivity, low noise level and high-reliability magnetic field operation.

KW - Diamond

KW - MEMS

KW - Magnetic sensors

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Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film

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