Evaluation of strained silicon by electron back scattering pattern compared with Raman measurement and edge force model calculation
Motohiro Tomita*, Daisuke Kosemura, Munehisa Takei, Kohki Nagata, Hiroaki Akamatsu, Atsushi Ogura
*この研究の対応する著者
研究成果: Conference contribution
5
被引用数
(Scopus)