@inproceedings{30eb058f1f6647578f2092f376b6ed19,
title = "Evaluation of temperature and germanium concentration dependence of EXAFS oscillations in Si-rich silicon germanium thin films",
abstract = "We measured the influence of the germanium (Ge) nearest neighbor atom on the lattice vibration of silicon germanium (SiGe) thin films on silicon substrate, which is expected as a material for next-generation electronic and thermoelectric devices, by x-ray absorption fine structure measurement. The amount of changes in the Debye-Waller factor (Δσ2) of each sample were estimated from the obtained extended x-ray absorption fine structure spectra, and it was experimentally clarified that the lattice vibration of the SiGe films were different from that of Ge. On the other hand, it is considered that the lattice vibration of the SiGe films were suppressed by the compressive strain, since Δσ2 have hardly changed with the Ge concentration. The Einstein temperature estimated from Δσ2 decreased with increasing Ge concentration, suggesting that the thermal conductivity of SiGe film can be controlled by Ge concentration.",
author = "K. Yoshioka and R. Yokogawa and M. Koharada and H. Takeuchi and G. Ogasawara and I. Hirosawa and T. Watanabe and A. Ogura",
note = "Publisher Copyright: {\textcopyright} The Electrochemical Society; Pacific Rim Meeting on Electrochemical and Solid State Science 2020, PRiME 200 ; Conference date: 04-10-2020 Through 09-10-2020",
year = "2020",
doi = "10.1149/09805.0473ecst",
language = "English",
series = "ECS Transactions",
publisher = "IOP Publishing Ltd.",
number = "5",
pages = "473--479",
editor = "Q. Liu and Hartmann, {J. M.} and Holt, {J. R.} and X. Gong and V. Jain and G. Niu and G. Masini and A. Ogura and S. Miyazaki and M. Ostling and W. Bi and A. Schulze and A. Mai",
booktitle = "PRiME 2020",
address = "United Kingdom",
edition = "5",
}