TY - GEN
T1 - Experimental and theoretical investigation of kt2and mechanical quality factor Qm in YbAlN films using DFT
AU - Iwata, Naoya
AU - Kinoshita, Sarina
AU - Jia, Junjun
AU - Suzuki, Masashi
AU - Yanagitani, Takahiko
N1 - Funding Information:
ACKNOWLEDGMENT This work was supported by the JST CREST (No. JPMJCR20Q1) and KAKENHI (Grant-in-Aid for Scientific Research No.19H02202, and No.18K19037).
Publisher Copyright:
© 2020 IEEE.
PY - 2020/9/7
Y1 - 2020/9/7
N2 - In the RF filter, both high kt2and high Qm are required. Now AlN films are used in the BAW filters because of high Qm, but AlN has low kt2• Our group previously found the enhancement of kt2 in YbAlN films [1] and reported theoretical prediction of k332 in YbxAl1-xN for the range of x=0 to 11 % [2]. In this study, we report the theoretical prediction of characteristic in YbxAl1-xN for the range of x=16.7 to 33% Furthermore, we estimate the experimental mechanical quality factor Qm of the YbAlN thin film. As a result, when Yb atomic concentration is 33%, the k332 of YbAlN is predicted to be 22%. It is approximately 3 times that of pure AlN. It was also confirmed that the Qm decreased with doping Yb.
AB - In the RF filter, both high kt2and high Qm are required. Now AlN films are used in the BAW filters because of high Qm, but AlN has low kt2• Our group previously found the enhancement of kt2 in YbAlN films [1] and reported theoretical prediction of k332 in YbxAl1-xN for the range of x=0 to 11 % [2]. In this study, we report the theoretical prediction of characteristic in YbxAl1-xN for the range of x=16.7 to 33% Furthermore, we estimate the experimental mechanical quality factor Qm of the YbAlN thin film. As a result, when Yb atomic concentration is 33%, the k332 of YbAlN is predicted to be 22%. It is approximately 3 times that of pure AlN. It was also confirmed that the Qm decreased with doping Yb.
KW - BAW filter
KW - YbAlN
UR - http://www.scopus.com/inward/record.url?scp=85097865761&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85097865761&partnerID=8YFLogxK
U2 - 10.1109/IUS46767.2020.9251775
DO - 10.1109/IUS46767.2020.9251775
M3 - Conference contribution
AN - SCOPUS:85097865761
T3 - IEEE International Ultrasonics Symposium, IUS
BT - IUS 2020 - International Ultrasonics Symposium, Proceedings
PB - IEEE Computer Society
T2 - 2020 IEEE International Ultrasonics Symposium, IUS 2020
Y2 - 7 September 2020 through 11 September 2020
ER -