TY - GEN
T1 - Extraction of kt2 of piezoelectric film/substrate structure by conversion loss derived by electromagnetic signal including no acoustic losses
AU - Tatsumi, Ryota
AU - Yanagitani, Takahiko
N1 - Funding Information:
This work was supported by the JST CREST (No. JPMJCR20Q1) and KAKENHI (Grant-in-Aid for Scientific Research No.19H02202, and No.18K19037).
Publisher Copyright:
© 2020 IEEE.
PY - 2020/9/7
Y1 - 2020/9/7
N2 - Electromechanical coupling coefficient (kt2) is an important parameter for determining the performances of RF BAW filters. According to the IEEE standard, the resonance-antiresonance method for a self-standing film structure is recommended to determine kt2 of the piezoelectric film. It is convenient and cost-effective to determine the kt2 from the film/wafer structure or epitaxial wafers. However, kt2 is underestimated due to the acoustic losses in the substrate in the conventional conversion loss method, which is powerful tool to extract the kt2 from HBAR. In this study, we introduce the conversion loss using electromagnetic signal including no acoustic losses.
AB - Electromechanical coupling coefficient (kt2) is an important parameter for determining the performances of RF BAW filters. According to the IEEE standard, the resonance-antiresonance method for a self-standing film structure is recommended to determine kt2 of the piezoelectric film. It is convenient and cost-effective to determine the kt2 from the film/wafer structure or epitaxial wafers. However, kt2 is underestimated due to the acoustic losses in the substrate in the conventional conversion loss method, which is powerful tool to extract the kt2 from HBAR. In this study, we introduce the conversion loss using electromagnetic signal including no acoustic losses.
KW - Electromechanical coupling coefficient
KW - HBAR
KW - Piezoelectric film
KW - Resonant frequency
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U2 - 10.1109/IUS46767.2020.9251575
DO - 10.1109/IUS46767.2020.9251575
M3 - Conference contribution
AN - SCOPUS:85097873606
T3 - IEEE International Ultrasonics Symposium, IUS
BT - IUS 2020 - International Ultrasonics Symposium, Proceedings
PB - IEEE Computer Society
T2 - 2020 IEEE International Ultrasonics Symposium, IUS 2020
Y2 - 7 September 2020 through 11 September 2020
ER -