Fabrication of Π-structured Bi-Te thermoelectric micro-device by electrodeposition

Kazuho Uda, Yuta Seki, Mikiko Saito, Yoshiaki Sonobe, Yu Chin Hsieh, Hidefumi Takahashi, Ichiro Terasaki, Takayuki Homma*


研究成果: Article査読

26 被引用数 (Scopus)


A Π-structured Bi-Te micro-thermoelectric device with a large upper electrode, i.e., an umbrella-type device, was fabricated via electrodeposition, and the effect of the size of the electrode was evaluated. The Bi-Te thermoelectric materials were electrodeposited from HNO3-based aqueous electrolyte. The device consisted of eight arrays, each consisting of 110 thermoelectric units, each of which was electrodeposited onto the patterned substrate with an array of 50 × 50 μm2 holes that were 20 μm deep. The deposition conditions for the n-type and p-type Bi-Te films were optimized to enable patterned electrodeposition of the materials to yield dense and uniform deposits. Accordingly, the materials were selectively deposited in a pattern to fabricate the thermoelectric micro-device. The resultant umbrella-type device, whose electrode is 1.65 times larger than smaller electrode, generated 4.57 times more power than the device with a smaller electrode. Therefore, we confirmed the improvement power by using an umbrella-type device.

ジャーナルElectrochimica Acta
出版ステータスPublished - 2015 1月 20

ASJC Scopus subject areas

  • 化学工学(全般)
  • 電気化学


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