TY - JOUR
T1 - Fabrication of 3D a-Si/SiO2 photonic crystals on 2D sub-micron-patterned InP substrates
AU - Segawa, Tetsuro
AU - Utaka, Katsuyuki
AU - Naganuma, Mitsuru
AU - Sato, Hisashi
AU - Kawakami, Shojiro
AU - Izutsu, Masayuki
AU - Nakao, Masashi
PY - 2002/1/1
Y1 - 2002/1/1
N2 - We have fabricated three-dimensional (3D) periodic structures consisting of stacked a-Si/SiO2 layers directly on two-dimensional (2D) sub-micron-patterned (100)-InP substrates by using autocloning technology. The initial 2D pattern has been reflected in the 3D periodic structures, whose height has been amplified. We have measured the transmission and reflection spectra of the 3D periodic structures, and have observed the photonic band gaps in the wavelength region of around 1400 to 2200 nm. We have also observed strong polarization dependency for the samples with the triangular lattice and week dependency for those of the square case.
AB - We have fabricated three-dimensional (3D) periodic structures consisting of stacked a-Si/SiO2 layers directly on two-dimensional (2D) sub-micron-patterned (100)-InP substrates by using autocloning technology. The initial 2D pattern has been reflected in the 3D periodic structures, whose height has been amplified. We have measured the transmission and reflection spectra of the 3D periodic structures, and have observed the photonic band gaps in the wavelength region of around 1400 to 2200 nm. We have also observed strong polarization dependency for the samples with the triangular lattice and week dependency for those of the square case.
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M3 - Conference article
AN - SCOPUS:0036051299
SN - 1092-8669
SP - 561
EP - 564
JO - Conference Proceedings - International Conference on Indium Phosphide and Related Materials
JF - Conference Proceedings - International Conference on Indium Phosphide and Related Materials
T2 - 14th Indium Phosphide and Related Materials Conference
Y2 - 12 May 2002 through 16 May 2002
ER -