A novel method has been proposed to fabricate an atomic force microscope (AFM) probe using CuO nanowire and a stress-induced method that can form the nanowire easily. By heating a commercial AFM probe with a film coating of Ta and Cu, a Cu hillock with CuO nanowires on its surface could be formed at the end of the probe. The thickness of the coating films, the heating temperature, and the heating time were investigated to obtain CuO nanowires with a high aspect ratio for use as an AFM probe tip. It was found that a suitable probe tip can be fabricated using the a Cu film thickness of 700 nm, a heating temperature of 380 °C and a heating time of 6 h. Probe tips (~5 μm high) and nanowires of ~25 nm diameter were obtained successfully. In the range evaluated, the measurement resolution of the CuO nanowire probe was slightly worse than that of a commercial AFM probe. However, both probes had almost the same dimensional measurement precision.
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