TY - GEN
T1 - Fabrication of plate-laminated waveguide for 350GHz band by silicon process
AU - Hirokawa, Jiro
AU - Suetsugu, Satoshi
AU - Minamikata, Yusuke
AU - Nagatsuma, Tadao
AU - Seto, Hiroyuki
AU - Inoue, Yoshiyuki
AU - Saito, Mikiko
PY - 2015/10/21
Y1 - 2015/10/21
N2 - This paper presents the fabrication of plate-laminated waveguides and cavities for 350GHz band by silicon process where the tolerance is less than several μm. We measure the transmission loss of the waveguide and the Q factors of the cavities, and then estimate the equivalent conductivity. We will also fabricate the plate-laminated waveguide slot array antennas (Y.Miura, J.Hirokawa et al., IEEE Trans. Antennas Propagat., 59, 2011, pp.2844-2851) and show the measured results in the conference.
AB - This paper presents the fabrication of plate-laminated waveguides and cavities for 350GHz band by silicon process where the tolerance is less than several μm. We measure the transmission loss of the waveguide and the Q factors of the cavities, and then estimate the equivalent conductivity. We will also fabricate the plate-laminated waveguide slot array antennas (Y.Miura, J.Hirokawa et al., IEEE Trans. Antennas Propagat., 59, 2011, pp.2844-2851) and show the measured results in the conference.
UR - http://www.scopus.com/inward/record.url?scp=84959463764&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84959463764&partnerID=8YFLogxK
U2 - 10.1109/URSI-AT-RASC.2015.7302839
DO - 10.1109/URSI-AT-RASC.2015.7302839
M3 - Conference contribution
AN - SCOPUS:84959463764
T3 - 2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015
BT - 2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015
Y2 - 16 May 2015 through 24 May 2015
ER -