抄録
We proposed a novel fabrication method of a pillar patterned self-standing curved film by spherical soft-UV imprint lithography. Soft-UV imprint lithography was performed using a patterned polydimethylsiloxane (PDMS) mold and a convex mold in order to pattern pillar onto large curved film. A mother patterned mold of spherical soft UV imprint lithography was prepared by unique 3D printer method. The curved film with the pillar pattern was successfully fabricated with a curvature radius of 40 mm. The proposed method is useful for 3D-structured fabrication of the optical devices.
| 本文言語 | English |
|---|---|
| ホスト出版物のタイトル | 2017 International Conference on Electronics Packaging, ICEP 2017 |
| 出版社 | Institute of Electrical and Electronics Engineers Inc. |
| ページ | 148-151 |
| ページ数 | 4 |
| ISBN（電子版） | 9784990218836 |
| DOI | |
| 出版ステータス | Published - 2017 6月 5 |
| イベント | 2017 International Conference on Electronics Packaging, ICEP 2017 - Tendo, Yamagata, Japan 継続期間: 2017 4月 19 → 2017 4月 22 |
Other
| Other | 2017 International Conference on Electronics Packaging, ICEP 2017 |
|---|---|
| 国/地域 | Japan |
| City | Tendo, Yamagata |
| Period | 17/4/19 → 17/4/22 |
ASJC Scopus subject areas
- 電子工学および電気工学
- 産業および生産工学
- 電子材料、光学材料、および磁性材料