Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system

Yoshito Nozaki; T. Kanai; A. Matsuo; Daiki Tanaka; Isamu Yuito; Teruaki Takeuchi; Tetsushi Sekiguchi; Shuichi Shoji

doi:10.1109/NANO.2016.7751484

Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system

Yoshito Nozaki, T. Kanai, A. Matsuo, Daiki Tanaka, Isamu Yuito, Teruaki Takeuchi, Tetsushi Sekiguchi, Shuichi Shoji

ナノ・ライフ創新研究機構

研究成果: Conference contribution

抄録

We conducted an experiment on the fabrication of fluidic devices for producing fine droplets. In our proposed method, multiple channels were fabricated by using a focused ion beam (FIB) system. The minimum feature top width was found to be approximately 56 nm. When both the target width and depth of one channel were set to 500 nm, the resultant top width was 750-780 nm, the bottom width was 250-320 nm, and the depth was 560 nm, almost achieving the target size for the channel depth.

本文言語	English
ホスト出版物のタイトル	16th International Conference on Nanotechnology - IEEE NANO 2016
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	795-798
ページ数	4
ISBN（電子版）	9781509039142
DOI	https://doi.org/10.1109/NANO.2016.7751484
出版ステータス	Published - 2016 11月 21
イベント	16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 - Sendai, Japan 継続期間: 2016 8月 22 → 2016 8月 25

Other

Other	16th IEEE International Conference on Nanotechnology - IEEE NANO 2016
国/地域	Japan
City	Sendai
Period	16/8/22 → 16/8/25

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
原子分子物理学および光学

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10.1109/NANO.2016.7751484

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引用スタイル

Nozaki, Y., Kanai, T., Matsuo, A., Tanaka, D., Yuito, I., Takeuchi, T., Sekiguchi, T., & Shoji, S. (2016). Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system. In 16th International Conference on Nanotechnology - IEEE NANO 2016 (pp. 795-798). Article 7751484 Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NANO.2016.7751484

Nozaki, Y, Kanai, T, Matsuo, A, Tanaka, D, Yuito, I, Takeuchi, T, Sekiguchi, T & Shoji, S 2016, Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system. in 16th International Conference on Nanotechnology - IEEE NANO 2016., 7751484, Institute of Electrical and Electronics Engineers Inc., pp. 795-798, 16th IEEE International Conference on Nanotechnology - IEEE NANO 2016, Sendai, Japan, 16/8/22. https://doi.org/10.1109/NANO.2016.7751484

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abstract = "We conducted an experiment on the fabrication of fluidic devices for producing fine droplets. In our proposed method, multiple channels were fabricated by using a focused ion beam (FIB) system. The minimum feature top width was found to be approximately 56 nm. When both the target width and depth of one channel were set to 500 nm, the resultant top width was 750-780 nm, the bottom width was 250-320 nm, and the depth was 560 nm, almost achieving the target size for the channel depth.",

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AU - Takeuchi, Teruaki

AU - Sekiguchi, Tetsushi

AU - Shoji, Shuichi

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Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system

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