Fabry-Perot optical modulator fabricated by aerosol deposition

Masafumi Nakada*, Keishi Ohashi, Hiroki Tsuda, Jun Akedo


研究成果: Conference article査読

5 被引用数 (Scopus)


We developed a Fabry-Perot (FP) optical modulator with electro-optic (EO) films fabricated by aerosol deposition (AD). We found the ferroelectric Pb(Zr,Ti)O3 film by AD produced a fairly high EO coefficient (>150 pm/V), approximately 10 times larger than that of LiNbO3. Since thick EO films greater than 5 μm can be deposited on a transparent electrode layer or a metallic mirror layer of the FP optical modulator by AD, the FP optical modulator can achieve low capacitance, resulting in high modulation speed. Transmittance spectra of the FP optical modulator coincided with the optical simulation spectra, which indicated that optical scattering in AD films and at the surface/boundary were very small. We demonstrated an optical intensity modulation with applied electric field to EO film of ferroelectric Pb (Zr, Ti)O3. We obtained a 4-dB modulation with 50 V for the 10-μm-thick modulator with dielectric multilayer mirror on a glass substrate.

ジャーナルProceedings of SPIE - The International Society for Optical Engineering
出版ステータスPublished - 2005 12月 1
イベントOptomechatronic Micro/Nano Devices and Components - Sappora, Japan
継続期間: 2005 12月 52005 12月 7

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学


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