TY - GEN
T1 - High-Efficiency Air-Clad Type Silicon-Nitride Ring-Resonator for Bio-Sensing Applications
AU - Atthi, Nithi
AU - Mendez-Astudillo, Manuel
AU - Udomsom, Suruk
AU - Matsumoto, Atsushi
AU - Yamwong, Wittawat
AU - Klunngien, Nipapan
AU - Mankong, Ukrit
AU - Pinlaor, Somchai
AU - Imai, Kazuo
AU - Angkaew, Tuptim
AU - Kanno, Atsushi
AU - Yamamoto, Naokatsu
AU - Kawanishi, Tetsuya
AU - Umezawa, Toshimasa
N1 - Funding Information:
ACKNOWLEDGMENT The authors would like to thank all staffs of TMEC-NECTEC, NICT, Waseda University, KKU, CU and CMU. This study has been partly conducted under the “Joint research project for Si photonics bio-sensing technology”, supported by International Development Fund in NICT, Japan.
Funding Information:
Supported by International Development Fund in NICT, Japan.
Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - In this paper, a high-efficiency silicon nitride (SiN) based air-clad type ring resonator that sandwiched with air cladding and SiO2 cladding for silicon photonic (SiPh) device was demonstrated. The simulation results showed that 400 nm-thick SiN waveguide have maximum coupling efficiency with a coupling loss of 7.2 dB. By using CMOS compatible process with single lithography (stepper) and reactive ion etching step, high qualities SiN waveguide was fabricated without silicon wafer warpage. The optical output characteristics of ring resonators with the free spectral range of 3.9 nm were obtained. This device can detect NaCl concentrations of 50-1000 mMole in deionized water. Therefore, SiN waveguide grating coupler is one of a promising SiPh devices for bio-sensing applications.
AB - In this paper, a high-efficiency silicon nitride (SiN) based air-clad type ring resonator that sandwiched with air cladding and SiO2 cladding for silicon photonic (SiPh) device was demonstrated. The simulation results showed that 400 nm-thick SiN waveguide have maximum coupling efficiency with a coupling loss of 7.2 dB. By using CMOS compatible process with single lithography (stepper) and reactive ion etching step, high qualities SiN waveguide was fabricated without silicon wafer warpage. The optical output characteristics of ring resonators with the free spectral range of 3.9 nm were obtained. This device can detect NaCl concentrations of 50-1000 mMole in deionized water. Therefore, SiN waveguide grating coupler is one of a promising SiPh devices for bio-sensing applications.
KW - air clad
KW - biosensor
KW - optical ring resonator
KW - silicon nitride
KW - silicon photonics
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U2 - 10.1109/iEECON53204.2022.9741668
DO - 10.1109/iEECON53204.2022.9741668
M3 - Conference contribution
AN - SCOPUS:85128224334
T3 - Proceedings of the 2022 International Electrical Engineering Congress, iEECON 2022
BT - Proceedings of the 2022 International Electrical Engineering Congress, iEECON 2022
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2022 International Electrical Engineering Congress, iEECON 2022
Y2 - 9 March 2022 through 11 March 2022
ER -