Single-walled carbon nanotube (SWNT) forest synthesis using antenna-type remote plasma chemical vapor deposition (ARPCVD) is presented. A series of synthesis using carbon monoxide gas as carbon feedstock reveals that the remote conditions, in other words, distance between an antenna and a substrate affects the quality of nanotube significantly. That is, far distance geometry on ARPCVD creates high-quality SWNTs. It motivates us to use same methodology for the synthesis using CH 4/H 2 previously proven to make long SWNT forests. Finally, along the methodology, we achieve to make SWNT forest with high-quality and small diameter successfully. This study offers an important suggestion to embody SWNT forests with both length and quality using remote plasma CVD.
|ジャーナル||Diamond and Related Materials|
|出版ステータス||Published - 2012 4月|
ASJC Scopus subject areas
- 化学 (全般)