High quality single-walled carbon nanotube synthesis using remote plasma CVD

Toshiyuki Ohashi*, Ryogo Kato, Takumi Ochiai, Toshio Tokune, Hiroshi Kawarada


研究成果: Article査読

18 被引用数 (Scopus)


Single-walled carbon nanotube (SWNT) forest synthesis using antenna-type remote plasma chemical vapor deposition (ARPCVD) is presented. A series of synthesis using carbon monoxide gas as carbon feedstock reveals that the remote conditions, in other words, distance between an antenna and a substrate affects the quality of nanotube significantly. That is, far distance geometry on ARPCVD creates high-quality SWNTs. It motivates us to use same methodology for the synthesis using CH 4/H 2 previously proven to make long SWNT forests. Finally, along the methodology, we achieve to make SWNT forest with high-quality and small diameter successfully. This study offers an important suggestion to embody SWNT forests with both length and quality using remote plasma CVD.

ジャーナルDiamond and Related Materials
出版ステータスPublished - 2012 4月

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 化学 (全般)
  • 機械工学
  • 物理学および天文学(全般)
  • 材料化学
  • 電子工学および電気工学


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