TY - JOUR
T1 - High-resolution electron microscope study of the PtSi-Si(111) interface
AU - Kawarada, H.
AU - Ishida, M.
AU - Nakanishi, J.
AU - Ohdomari, I.
AU - Horiuchi, S.
N1 - Funding Information:
This work was supported in part by a Grant-in-Aid for Special Project Research on Nanometer Structure Electronics (1984) from the Ministry of Education, Science and Culture in Japan.
PY - 1986/11
Y1 - 1986/11
N2 - The atomic arrangement of the PtSi-Si(111) interface and epitaxial growth of PtSi on Si(111) have been investigated using lattice imaging. Small PtSi domains (20–40nm) which have three equivalent positions on Si(111) grow epitaxially all over the substrate with an atomically uneven interface. However, the transition from a PtSi lattice to a Si lattice is abrupt. The interface has atomic steps, which have been verified by image simulations at the interface. Atomic-scale models of the interface consistent with the observed lattice images have been derived. In the proposed models, inclined interfaces increase the local coherency between PtSi and Si. The validity of the models has been examined by classical ideas of interphase boundaries.
AB - The atomic arrangement of the PtSi-Si(111) interface and epitaxial growth of PtSi on Si(111) have been investigated using lattice imaging. Small PtSi domains (20–40nm) which have three equivalent positions on Si(111) grow epitaxially all over the substrate with an atomically uneven interface. However, the transition from a PtSi lattice to a Si lattice is abrupt. The interface has atomic steps, which have been verified by image simulations at the interface. Atomic-scale models of the interface consistent with the observed lattice images have been derived. In the proposed models, inclined interfaces increase the local coherency between PtSi and Si. The validity of the models has been examined by classical ideas of interphase boundaries.
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U2 - 10.1080/01418618608244029
DO - 10.1080/01418618608244029
M3 - Article
AN - SCOPUS:0022809656
SN - 0141-8610
VL - 54
SP - 729
EP - 741
JO - Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties
JF - Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties
IS - 5
ER -