High Transmittance and High Diffraction Efficiency with SiN Metasurface Holograms

Masakazu Yamaguchi, Hiroki Saito, Satoshi Ikezawa, Kentaro Iwami*

*この研究の対応する著者

研究成果: Conference contribution

抄録

The high 92% transmittance and 73% diffraction efficiency were achieved in polarization-independent full-color metasurface holograms made of silicon nitride (SiN) high-aspect-ratio nanopillars. The absolute efficiency of 67% calculated from these results is a significant improvement over the results reported at IEEE-MEMS-2023 [1]. This achievement was obtained by optimizing the RIE conditions for SiN, a meta-atom material with high transmittance in the visible light range. A full-color dielectric metasurface holographic image was achieved by spatially multiplexing frames with blue, green, and red color channels at the wavelengths of 445 nm, 532 nm, and 633 nm.

本文言語English
ホスト出版物のタイトルIEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024
出版社Institute of Electrical and Electronics Engineers Inc.
ページ1031-1034
ページ数4
ISBN(電子版)9798350357929
DOI
出版ステータスPublished - 2024
イベント37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 - Austin, United States
継続期間: 2024 1月 212024 1月 25

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Conference

Conference37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024
国/地域United States
CityAustin
Period24/1/2124/1/25

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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