TY - GEN
T1 - Higher-order shear mode FBAR using polarization-inverted layers of (112̄0) textured ZnO films
AU - Yoshinori, Miyamoto
AU - Yanagitani, Takahiko
AU - Matsukawa, Mami
AU - Watanabe, Yoshiaki
PY - 2005/12/1
Y1 - 2005/12/1
N2 - Second-order shear mode FBAR using (1120) textured ZnO film was fabricated. This FBAR contained two ZnO layers with opposite polarizations. Crystallites growth directions of the ZnO layers were clarified by X-ray pole figure analysis. Characteristics of this FBAR were experimentally and theoretically investigated.
AB - Second-order shear mode FBAR using (1120) textured ZnO film was fabricated. This FBAR contained two ZnO layers with opposite polarizations. Crystallites growth directions of the ZnO layers were clarified by X-ray pole figure analysis. Characteristics of this FBAR were experimentally and theoretically investigated.
KW - (112̄0) textured zinc oxide
KW - Component
KW - Higher order mode FBAR
KW - Polarization-inverted piezoelectric layers
KW - Shear mode
UR - http://www.scopus.com/inward/record.url?scp=33847169845&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33847169845&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.2005.1603224
DO - 10.1109/ULTSYM.2005.1603224
M3 - Conference contribution
AN - SCOPUS:33847169845
SN - 0780393821
SN - 9780780393820
T3 - Proceedings - IEEE Ultrasonics Symposium
SP - 1828
EP - 1831
BT - 2005 IEEE Ultrasonics Symposium
T2 - 2005 IEEE Ultrasonics Symposium
Y2 - 18 September 2005 through 21 September 2005
ER -