Highly efficient electron gun with a single-atom electron source

Tsuyoshi Ishikawa; Tomohiro Urata; Boklae Cho; Eiji Rokuta; Chuhei Oshima; Yoshinori Terui; Hidekazu Saito; Akira Yonezawa; Tien T. Tsong

doi:10.1063/1.2720348

Highly efficient electron gun with a single-atom electron source

Tsuyoshi Ishikawa^*, Tomohiro Urata, Boklae Cho, Eiji Rokuta, Chuhei Oshima, Yoshinori Terui, Hidekazu Saito, Akira Yonezawa, Tien T. Tsong

^*この研究の対応する著者

早稲田大学

研究成果: Article › 査読

32 被引用数 (Scopus)

抄録

The authors have demonstrated highly collimated electron-beam emission from a practical electron gun with a single-atom electron source; ∼80% of the total emission current entered the electron optics. This ratio was two or three orders of magnitude higher than those of the conventional electron sources such as a cold field emission gun and a ZrOW Schottky gun. At the pressure of less than 1× 10-9 Pa, the authors observed stable emission of 20 nA, which generates the specimen current of 5 pA required for scanning electron microscopes.

本文言語	English
論文番号	143120
ジャーナル	Applied Physics Letters
巻	90
号	14
DOI	https://doi.org/10.1063/1.2720348
出版ステータス	Published - 2007

ASJC Scopus subject areas

物理学および天文学（その他）

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10.1063/1.2720348

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title = "Highly efficient electron gun with a single-atom electron source",

abstract = "The authors have demonstrated highly collimated electron-beam emission from a practical electron gun with a single-atom electron source; ∼80% of the total emission current entered the electron optics. This ratio was two or three orders of magnitude higher than those of the conventional electron sources such as a cold field emission gun and a ZrOW Schottky gun. At the pressure of less than 1× 10-9 Pa, the authors observed stable emission of 20 nA, which generates the specimen current of 5 pA required for scanning electron microscopes.",

author = "Tsuyoshi Ishikawa and Tomohiro Urata and Boklae Cho and Eiji Rokuta and Chuhei Oshima and Yoshinori Terui and Hidekazu Saito and Akira Yonezawa and Tsong, {Tien T.}",

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doi = "10.1063/1.2720348",

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journal = "Applied Physics Letters",

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T1 - Highly efficient electron gun with a single-atom electron source

AU - Ishikawa, Tsuyoshi

AU - Urata, Tomohiro

AU - Cho, Boklae

AU - Rokuta, Eiji

AU - Oshima, Chuhei

AU - Terui, Yoshinori

AU - Saito, Hidekazu

AU - Yonezawa, Akira

AU - Tsong, Tien T.

PY - 2007

Y1 - 2007

N2 - The authors have demonstrated highly collimated electron-beam emission from a practical electron gun with a single-atom electron source; ∼80% of the total emission current entered the electron optics. This ratio was two or three orders of magnitude higher than those of the conventional electron sources such as a cold field emission gun and a ZrOW Schottky gun. At the pressure of less than 1× 10-9 Pa, the authors observed stable emission of 20 nA, which generates the specimen current of 5 pA required for scanning electron microscopes.

AB - The authors have demonstrated highly collimated electron-beam emission from a practical electron gun with a single-atom electron source; ∼80% of the total emission current entered the electron optics. This ratio was two or three orders of magnitude higher than those of the conventional electron sources such as a cold field emission gun and a ZrOW Schottky gun. At the pressure of less than 1× 10-9 Pa, the authors observed stable emission of 20 nA, which generates the specimen current of 5 pA required for scanning electron microscopes.

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DO - 10.1063/1.2720348

M3 - Article

AN - SCOPUS:34047266359

SN - 0003-6951

VL - 90

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 14

M1 - 143120

ER -

Highly efficient electron gun with a single-atom electron source

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