TY - GEN
T1 - IBAD c-axis parallel ZnO piezoelectric film stack for gyroscope applications
AU - Kudo, Shinya
AU - Ekida, Kohei
AU - Jia, Junjun
AU - Yanagitani, Takahiko
N1 - Funding Information:
ACKNOWLEDGMENT This work was supported by JST CREST (No. JPMJCR20Q1), JST FOREST and KAKENHI (Grant-in-Aid for Scientific Research B, No.19H02202, No.21K18734).
Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - We proposed a novel gyroscope sensor based on the transmission-and-detection type gyroscope sensor with the acoustic delay line. The c-axis parallel ZnO films are suitable as piezoelectric layer to detect the pure shear wave. In this study, the c-axis parallel ZnO thin films by using the ion beam assisted RF magnetron sputtering. c-Axis in-plane direction of the top layer and bottom layer were successfully controlled to be vertical by using ion beam direction in order to fabricate the transmission-and-detection type gyroscope sensors. The transducer comprised of the c-axis parallel ZnO thin film shows a shear mode electromechanical coupling coefficient k152of 2.0%. Importantly, the pure shear wave excitation was observed in our gyroscope sensor.
AB - We proposed a novel gyroscope sensor based on the transmission-and-detection type gyroscope sensor with the acoustic delay line. The c-axis parallel ZnO films are suitable as piezoelectric layer to detect the pure shear wave. In this study, the c-axis parallel ZnO thin films by using the ion beam assisted RF magnetron sputtering. c-Axis in-plane direction of the top layer and bottom layer were successfully controlled to be vertical by using ion beam direction in order to fabricate the transmission-and-detection type gyroscope sensors. The transducer comprised of the c-axis parallel ZnO thin film shows a shear mode electromechanical coupling coefficient k152of 2.0%. Importantly, the pure shear wave excitation was observed in our gyroscope sensor.
KW - c-axis parallel ZnO
KW - ion beam assisted deposition
KW - MEMS gyroscope
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U2 - 10.1109/IUS54386.2022.9957235
DO - 10.1109/IUS54386.2022.9957235
M3 - Conference contribution
AN - SCOPUS:85143781128
T3 - IEEE International Ultrasonics Symposium, IUS
BT - IUS 2022 - IEEE International Ultrasonics Symposium
PB - IEEE Computer Society
T2 - 2022 IEEE International Ultrasonics Symposium, IUS 2022
Y2 - 10 October 2022 through 13 October 2022
ER -