IBAD c-axis parallel ZnO piezoelectric film stack for gyroscope applications
Shinya Kudo, Kohei Ekida, Junjun Jia, Takahiko Yanagitani
研究成果: Conference contribution
Shinya Kudo, Kohei Ekida, Junjun Jia, Takahiko Yanagitani
研究成果: Conference contribution