TY - GEN
T1 - Improvement of c-Axis Parallel Orientaition of ZnO film on Silica Glass Pipes with Various Diameters for SH-SAW Pipe Sensor
AU - Wakabayashi, Takuya
AU - Takayanagi, Shinji
AU - Matukawa, Mami
AU - Takamura, Yuta
AU - Yanagitani, Takahiko
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/10
Y1 - 2019/10
N2 - Shear horizontal surface acoustic wave (SH-SAW) sensors have been studied for measurements of liquid properties. The long-distance propagation of SH-SAW with multiple wave roundtrips on a pipe surface improve the measurement sensitivity. c-Axis parallel oriented ZnO films can excite the SH-SAW and be grown on a curved surface by a sputtering deposition. In this study, the ZnO film growths on pipe surfaces with various pipe diameters were demonstrated. The c-axis parallel oriented ZnO film with high orientation was only obtained on the pipe surface facing the sputtering target plane. A slit which limits the deposition area and an automatic rotation system of the pipe were effective for the uniform film growth on the entire pipe surface. This film/pipe substrate structure is a good candidate for the SHSAW sensor with high sensitivity.
AB - Shear horizontal surface acoustic wave (SH-SAW) sensors have been studied for measurements of liquid properties. The long-distance propagation of SH-SAW with multiple wave roundtrips on a pipe surface improve the measurement sensitivity. c-Axis parallel oriented ZnO films can excite the SH-SAW and be grown on a curved surface by a sputtering deposition. In this study, the ZnO film growths on pipe surfaces with various pipe diameters were demonstrated. The c-axis parallel oriented ZnO film with high orientation was only obtained on the pipe surface facing the sputtering target plane. A slit which limits the deposition area and an automatic rotation system of the pipe were effective for the uniform film growth on the entire pipe surface. This film/pipe substrate structure is a good candidate for the SHSAW sensor with high sensitivity.
KW - Pipe structure
KW - Sputtering deposition
KW - Surface acoustic wave
KW - ZnO
KW - c-Axis parallel oriented film
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U2 - 10.1109/ULTSYM.2019.8925796
DO - 10.1109/ULTSYM.2019.8925796
M3 - Conference contribution
AN - SCOPUS:85077631955
T3 - IEEE International Ultrasonics Symposium, IUS
SP - 671
EP - 674
BT - 2019 IEEE International Ultrasonics Symposium, IUS 2019
PB - IEEE Computer Society
T2 - 2019 IEEE International Ultrasonics Symposium, IUS 2019
Y2 - 6 October 2019 through 9 October 2019
ER -