抄録
Coverage of the (Formula presented)-reconstructed region on quenched Si(111) surfaces has been compared for two types of Si wafers with different oxygen concentration, Czochralski and modified float zone (m-FZ) wafers. The m-FZ wafer clearly showed the lower coverage, which suggested that oxygen had some influence on the formation of a (Formula presented) structure. The activation energy of formation of the (Formula presented) structure has been estimated to be 2.4 eV.
本文言語 | English |
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ページ(範囲) | 9863-9866 |
ページ数 | 4 |
ジャーナル | Physical Review B - Condensed Matter and Materials Physics |
巻 | 58 |
号 | 15 |
DOI | |
出版ステータス | Published - 1998 1月 1 |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 凝縮系物理学